 
        
 
                            | Specifications | |
| Maximum diameter | 1200mm | 
| Degree of vacuum | MIN:2Pa | 
| Minimum detectable leak rate | 5×10-13 Pa•m3/s | 
 Maximum diameter: 1200mm
Maximum diameter: 1200mm
                                         Vacuum degree: 2Pa
Vacuum degree: 2Pa
                                         Minimum detectable leak rate: 5 × 10-13 Pa • m3/s
Minimum detectable leak rate: 5 × 10-13 Pa • m3/s
                                         T/CATSI 02010-2022 "Gas tightness helium leak detection method"
T/CATSI 02010-2022 "Gas tightness helium leak detection method"